Non-contact, In-line Characterization of Performance Variability
Performance-Based Metrology (PBM)™
Provides non-contact & pad-less measurements of in-die product performance monitors throughout technology development/product ramp and production cycles that enables improved bin-yield forecasting from 1st metal silicon. PBM fills the scribe-to-final test information gap with early, continuous, in-die measurements on product wafers.
- Near 1% measurement repeatability
- High-throughput (< 50ms/measurement)
- Early phase characterization
- Production Monitor
Automated Optoelectronic Metrology System
Simplified PBM Test Block
PBM Couples Metrology and Performance Impact
PBM Measurement Technique
tau-Metrix (TMX) Milestones
PBM vs. “conventional” techniques for in-die control
