Non-contact, In-line Characterization of Performance Variability
Further Reading
Conferences & Events
Presentations and Papers
tau-Metrix General Overview
- Performance Based Metrology (PBM) - Nader Pakdaman, James S. Vickers, Mario M. Pelella, Gary Steinbrueck, and Majid Babazadeh
2009
- Non-Contact, Pad-less Measurement Technology and Test Structures for Characterization of Cross-Wafer and In-Die Product Variability - J. S. Vickers, J. Galvier, W. Doedel,G. Steinbrueck, B. Borot, M. Gatefait, P. Gouraud, P. Gros, G. Johnson, M. Babazadeh, M. Pelella, and N. Pakdaman Presented at SPIE
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Non-Contact, Pad-less Measurement Technology and Test Structures for Characterization of Cross-Wafer and In-Die Product Variability
- Gary Steinbrueck, James S. Vickers, Majid Babazadeh, Mario M. Pelella, and Nader Pakdaman
Presented at ICMTS
- In-line non-contact measurement of process induced in-die parametric variability - James Vickers, Jean Galvier, Bertrand Borot, Wim Doedel, Gary Steinbrueck, Gloria Johnson, Majid Babazadeh and Nader Pakdaman Presented at ASCM
2008
- In-line monitor and control of product (in-die) parametric variability and yield - James. S. Vickers, et al. Presented at Semi-Japan