Non-contact, In-line Characterization of Performance Variability

Mission

tau-Metrix (TMX) provides non-invasive, time-based characterization technologies for the semiconductor industry.

Overview

tau-Metrix is a Silicon Valley semiconductor capital equipment company and is dedicated to enable the efficient, non-contact, pad-less, intra-die performance-variability characterization throughout the product's development and high-volume ramp cycles.

Value

Our performance-based metrology (PBM) products enable non-contact, product-representative performance RO measurements at first Metal to obtain in-line, intra- and inter-die variability metrics four to six weeks sooner than conventional end-of-line methods.

• PBM enables in-die measurements of ROs at first connectivity
• PBM allows small foot-print (pad-less) product-representative RO assessment
• PBM provides improved correlation to product-performance metrics
• PBM is not limited to sample or sacrificial product wafers for early feedback
• PBM reduces test measurement-induced particles and related defects